Patterned Defect Inspection:
• KLA-Tencor 2132/33 Parts
• KLA-Tencor 2135/8/9 Parts
• KLA-Tencor 2360/5/7 Parts
• KLA-Tencor 2401/30 Parts (Viper) Parts
• KLA-Tencor AIT-xx Parts
• KLA-Tencor 9xxx Parts (PUMA)

Patterned Overlay Metrology:
• KLA-Tencor 5xxx & Archer Parts

Non-Patterned Surface Defect Inspection:
• KLA-Tencor SP1-xxx Parts
• KLA-Tencor SurfScan Parts

Patterned Ultra-Violet (UV) Film Thickness Measurement:
• KLA-Tencor UV1xx0 Parts
• KLA-Tencor F5(x) & SFx Parts

KLA-Tencor Surface Profiler Parts


KLA-Tencor 8xxx CD-SEM System Parts
KLA-Tencor Vacuum System Parts


KLA-Tencor Motors
KLA-Tencor Patlite Light Towers
KLA-Tencor Stages

• Prometrix Parts
• Therma-wave Parts