Parts < KLA-Tencor 5xxx & Archer Parts   REQUEST A QUOTE: e-mail sales@gSEMI.com
 
 
Model / Part Number Description
KLA-Tencor 5100/5100XP/5105XP/5200XP Part# 0147371-000 End Effector Assembly
KLA-Tencor Archer PN Part# 0011283-000 5300NT CCD Cohu Camera
KLA-Tencor Archer PN Part# 0011286-002 Archer 10 PZT Driver Board
KLA-Tencor Archer PN Part# 0011327-000 PCA NT PZT Controller Board
KLA-Tencor 5300/Archer PN Part# 0013427-000 5300/ArcherNT I/O Board Assy
KLA-Tencor 5300/Archer PN Part# 0053800-001 Archer Wait Station
KLA-Tencor 5300/Archer PN Part# 0059518-000 PCB, A20 Feedback PZT Drive
KLA-Tencor 5xxx PN Part# 0148763-000 51/52 SMIF End Effector
KLA-Tencor 5010 or 5200XP Part# 030-400168-00 Camera
KLA-Tencor 5100/5100XP/5105XP/5200XP Part# 030-450519-00 Camera
KLA-Tencor 5200XP Part# 030-473089-000 Camera
KLA-Tencor 5010/5100XP/5105XP/5200X Part# 450-451822-00 PZT"W" 20Ám range w/sensor, cable
KLA-Tencor 5010/5100XP/5105XP/5200X Part# 450-451849-00 PZT"Z" 40Ám range w/sensor, cable
KLA-Tencor 5100 or 5200XP Part# 710-400363-00 Motherboard Assembly
KLA-Tencor 5100XP/5105XP/5200XP Part# 710-400535-00 LIN Array Board Assembly
KLA-Tencor 5100XP or 5200XP Part# 710-404144-00 PZT Feedback Board
KLA-Tencor 5200XP Part# 710-404146-00 A.L. Extention Board
KLA-Tencor 5010/5100XP/5105XP/5200XP Part# 710-404208-00 ARM Board
KLA-Tencor 5100XP Part# 710-404228-00 Limit Breakout Board
KLA-Tencor 5010/5100/5200XP Part# 710-404368-00 ALIB1 Board
KLA-Tencor 5010 or 5200XP Part# 710-404420-00 I/O Board
KLA-Tencor 5010/5100/5200XP Part# 710-404556-00 Stepper Driver Board
KLA-Tencor 5100/5100XP/5200XP Part# 710-404582-00 PZT Controller Board
KLA-Tencor 50xx Part# 712-404056-11 SBC VME CPU 16Hz 4Mb (Rev.B)
KLA-Tencor Archer Part# 710-404584-00 PDA (Pin Diode Array) Assy.
KLA-Tencor 5200XP Part# 710-450818-002 Pin Diode Board Assembly
KLA-Tencor 5100/5105/5100XP Part# 710-451730-00 Encoder Board Assembly
KLA-Tencor 5x00 Part# 710-471773-000 PEARL PZT Adapter Board
KLA-Tencor 5300/Archer Part# 710-480099-002 5300/Archer PZT Driver Board Assy
KLA-Tencor 5300 Part# 710-480101-006 5300 Interface Board Assy
KLA-Tencor 5300/Archer Part# 710-482350-001 5300NT PDA Box Assy
KLA-Tencor 5105/5200 Part# 712-404561-00 8MB Memory Board
KLA-Tencor 5100 or 5200XP Part# 712-450673-00 Motor CPU 16.7Hz,4MB
KLA-Tencor 5300/Archer Part# 712-482130-000 5300 Fan Assy
KLA-Tencor 5100XP or 5200XP Part# 716-402608-00 Pre Aligner Assembly
KLA-Tencor 5100/5100XP/5200XP Part# 716-412248-00 Low Contamination Linear Arm Assembly
KLA-Tencor 5100/5100XP/5200XP Part# 716-450033-00 Shutter Assembly
KLA-Tencor 5200 or 5200XP Part# 716-470036-00 52XX Stage
KLA-Tencor Archer Part# 716-480011-003 Floatation System w/new Springs
KLA-Tencor Archer Part# 716-480428-004 XYT Stage BO SHN 565 091 096
KLA-Tencor 5200XP Part# 718-482633-000 5300 CPU Assembly
KLA-Tencor 5100/5200XP Part# 718-482633-001 Motorola Single Board Computer
KLA-Tencor 51xx/52xx Part# 720-450025-00 5100 Illuminator Assy (Rev. B1)
KLA-Tencor 5200/5100XP/5200XP Part# 720-451715-00 KLAASP 1/2" Assembly T/K
KLA-Tencor 5100/5100XP/5200XP Part# 720-470028-00 Dual Apperature 5200 Assembly
KLA-Tencor 5300/Archer Part# 720-482342-000 End Effector Kit 8" for 5300 Assy
KLA-Tencor 5100 Part# 730-401953-01 V Motor
KLA-Tencor 5xxx Part# 740-450321-00 VFU Assy.
KLA-Tencor 5100XP or 5200XP Part# 740-451952-00 Elevator Assembly
KLA-Tencor 5200XP Part# 740-470299-00 VFU 52 Assembly
KLA-Tencor 5300/Archer Part# 740-480413-002 8"-12" Chuck for 5300
KLA-Tencor 5100/5200/5200XP Part# 750-400159-00 Digitizer VIP 1024 (Matrox)
KLA-Tencor 5010 Part# 750-404260-00 Bit 3 VME Board
KLA-Tencor 5100 or 5100XP Part# 750-450863-00 Line Conditioner, 3KVA 60Hz Japan
KLA-Tencor 5200XP Part# 750-472512-000 Main Locker Assembly for SMIF: BYE OAS
KLA-Tencor 5200XP Part# 760-472812-000 Camera
We have more 5xxx & Archer parts not listed as well...  

 

 

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