| Model / Part Number |
Description |
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| KLA-Tencor UV1xx0 PN 0002899-000 |
PCA, Interface, Handler, Cassette Rotation |
KLA-Tencor UV1xx0 PN 21-0061 |
Image Processor, Cognex 5400 |
| KLA-Tencor UV1xx0 PN 26-0105 |
PCA, Video, Matrox MARVEL |
| KLA-Tencor UV1xx0 PN 26-0144 |
PCA, Intel Etherx Pro/100 |
| KLA-Tencor UV1xx0 PN 28-0115 |
XE Lamp Power Supply, 75W |
| KLA-Tencor UV1xx0 PN 28-0117 |
DC Power Supply |
| KLA-Tencor UV1xx0 PN 28-0141 |
Power Distribution Module (aka PN 0024618-000) |
| KLA-Tencor UV1xx0 PN 28-0142 |
Line Conditioner; 2.8KVA |
| KLA-Tencor UV1xx0 PN 28-0148 |
Line Conditioner; 1.9KVA (Non-Mini Environment Option) |
| KLA-Tencor UV1xx0 PN 29-0259 |
Tropel Lens, 1X DUV Objective |
| KLA-Tencor UV1xx0 PN 29-0260 |
Tropel Lens, 15X DUV Objective |
| KLA-Tencor UV1xx0 PN 30-0004 |
Pre-Aligner Assy |
| KLA-Tencor UV1xx0 PN 30-0030 |
Controller Assy |
| KLA-Tencor UV1xx0 PN 30-0031 |
Mini-Environment (non SMIF) |
| KLA-Tencor UV1xx0 PN 36-0363 |
PCA, Interface, Handler, Cassette Rotation |
| KLA-Tencor UV1xx0 PN 42-0513 |
Universal Chuck |
| KLA-Tencor UV1xx0 PN 51-0175 |
Flat Aligner Assy, Handler |
| KLA-Tencor UV1xx0 PN 52-0273 |
Wafer Platen (Chuck) |
| KLA-Tencor UV1xx0 PN 52-0279 |
Lamp Assy, w/Heatsink |
| KLA-Tencor UV1xx0 PN 52-0282 |
Motor Assy, Filter Wheel, "Filter Wheel Motor Assy" |
| KLA-Tencor UV1xx0 PN 52-0286 |
Filter Assy, Neutral Density Optics |
| KLA-Tencor UV1xx0 PN 52-0396 |
Stage Assy Z |
| KLA-Tencor UV1xx0 PN 52-0405 |
Drive Train Assy, Z-Stage |
| KLA-Tencor UV1xx0 PN 52-0415 |
Motor Assy, Servo |
| KLA-Tencor UV1xx0 PN 52-0479 |
CCD Video Camera Module - RGB |
| KLA-Tencor UV1xx0 PN 52-0556 |
Turret Assy Optics SE |
| KLA-Tencor UV1xx0 PN 52-0559 |
Assy, Optics Block Illum, SE |
| KLA-Tencor UV1xx0 PN 52-0563 |
2-Phase Stepping Motor "Stepper Motor Assy" |
| KLA-Tencor UV1xx0 PN 52-0583 |
Assy, Electronics Lid, SE |
| KLA-Tencor UV1xx0 PN 52-0620 |
ND/Color Filter Wheel SE "Color Filter Wheel Assy" |
| KLA-Tencor UV1xx0 PN 52-0626 |
Encapsulated
Reference Chip Assy |
KLA-Tencor UV1xx0 PN 52-0695 |
Assy, Focus Flipper Driver |
| KLA-Tencor UV1xx0 PN 52-0707 |
Assy, Adapter Plate, Cassette Base, 100mm |
| KLA-Tencor UV1xx0 PN 52-0708 |
Assy, Adapter Plate, Cassette Base, 125mm |
| KLA-Tencor UV1xx0 PN 52-0709 |
Assy, Adapter Plate, Cassette Base, 150mm |
| KLA-Tencor UV1xx0 PN 52-0734 |
SXP-325, 2 Way Converter w/Buffer |
| KLA-Tencor UV1xx0 PN 52-0744 |
Assy Turret Optics, 72 DEG |
| KLA-Tencor UV1xx0 PN 52-0750 |
Assy Apodized Polarizer, UV1xxx |
| KLA-Tencor UV1xx0 PN 54-0265 |
PCA, Turret Stepper Motor Interface (PCB 35-0265) |
| KLA-Tencor UV1xx0 PN 54-0273 |
PCA Assy, Operator Interface Bd, (UV1280) |
| KLA-Tencor UV1xx0 PN 54-0277 |
PCA Assy, Operator Interface Bd. |
| KLA-Tencor UV1xx0 PN 54-0286 |
PCA Zero Order Focus Sensor |
| KLA-Tencor UV1xx0 PN 54-0287 |
PCA Stage Driver F2 |
| KLA-Tencor UV1xx0 PN 54-0288 |
PCA, Sensor, Z Limit |
| KLA-Tencor UV1xx0 PN 54-0290 |
X Motor Interface |
| KLA-Tencor UV1xx0 PN 54-0291 |
PCA, Z Motor Interface |
| KLA-Tencor UV1xx0 PN 54-0298 |
PCA, VTF 4-Channel Interface |
| KLA-Tencor UV1xx0 PN 54-0317 |
PCA, Measurement Control Board |
| KLA-Tencor UV1xx0 PN 54-0324 |
PCA, Measurement Control Board |
| KLA-Tencor UV1xx0 PN 54-0346 |
PCA, Optics Interface |
| KLA-Tencor UV1xx0 PN 54-0350 |
PCA IPDA Interface 2, UV1250SE |
| KLA-Tencor UV1xx0 PN 54-0354 |
PCA Assy, Radial Stage Sensor |
| KLA-Tencor UV1xx0 PN 54-0374 |
PCA, Measurement Control UV1050 |
| KLA-Tencor UV1xx0 PN 54-0384 |
PCA, PCIF / Comm. Ports |
| KLA-Tencor UV1xx0 PN 54-0393 |
SBC Interconnect |
| KLA-Tencor UV1xx0 PN 55-0659-01 |
Cable Assy, Camera, UV Optics |
| KLA-Tencor UV1xx0 PN 55-0733 |
Cable Assy, Camera DWR, UV-Optics |
| KLA-Tencor UV1xx0 PN 55-1106 |
Cable Assy, RGB, Y/C, COHO |
| KLA-Tencor UV1xx0 PN 58-0629 |
Kit, Box Retrofit |
| KLA-Tencor UV1xx0 PN 58-0697 |
Locator Assy, 150mm |
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| We have more UV1xx0 parts not listed as well... |
