| Part
Number: |
Description |
| KLA-Tencor Stage Part# 121914 |
3-Axis AIT Air Bearing Stage |
| KLA-Tencor Stage Part# 391921 |
Filter Stage |
| KLA-Tencor Stage Part# 30-0074 |
STAGE ASSY,XY,330MM X 400MM (aka 0262330-000) |
| KLA-Tencor Stage Part# 42-0253 |
Lead Screw, X-Stage |
| KLA-Tencor Stage Part# 52-0270 |
Encoder Assy, Linear, Y Stage |
| KLA-Tencor Stage Part# 52-0271 |
Assy, Linear Encoder, X Stage |
| KLA-Tencor Stage Part# 52-0365 |
Brake Assy, 2-Stage |
| KLA-Tencor Stage Part# 52-0405 |
Drive Train Assy, Z-Stage |
| KLA-Tencor Stage Part# 60023-3X |
X-Stage |
| KLA-Tencor Stage Part# 60023-3Y |
Y-Stage |
| KLA-Tencor Stage Part# 720-08101-001 |
Z-Stage |
| KLA-Tencor Stage Part# 720-08101-005 |
Z-Stage |
| KLA-Tencor Stage Part# 720-22921-002 |
Assy, Bellows Pins Mount,Z-Stage |
| KLA-Tencor Stage Part# 740-673035-002 |
Assy Stage |
| KLA-Tencor Stage Part# 740-673035-001 |
FRU, Assy, Stage |
