KLA-Tencor ASET-F5x
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- Patterned UV Film Thickness Measurement
- Dual Open Cassette Configuration
- SE Accuracy ±1.5 Å for films ≤125Å
  ±1Å for films 125Å -300Å
  ±0.3% for films 300Å to 1µm
- SE Precision (Thickness only a single layer oxide or nitride)
  20-100Å < 0.10Å
  100-300Å < 0.30Å
  300-2000Å <0.50Å
  2000Å1um < 0.025%
- DBS Accuracy ±1.0% for films 250Å to 1.0µm
- DBS Stability= 500-2000Å ≤ 2.5Å and 2000Å-1µm ≤ 0.25%
- Brooks robot, controller, & pre-aligner
- Full Calibration and Installation Services available