Parts < KLA-Tencor F5(x) & SFx Parts   REQUEST A QUOTE: e-mail sales@gSEMI.com
 
 
Model / Part Number Description
KLA-Tencor PN 0024636-000 AC Power Distribution Module
KLA-Tencor PN 0052168-000 Assy, P3 850MHz Computer, UV with PatMax
KLA-Tencor PN 0053415-001 Assy, P3 850MHz Computer, UV (no PatMax)
KLA-Tencor PN 0059825-001 PCA, SE Fine Focus, W/FW V1.6.Tested
KLA-Tencor PN 0070795-000 DB-VMESA, MEI P/N 1007-0031
KLA-Tencor PN 0085863-000 FRU, Assy, Platen 200/300mm Single Finger
KLA-Tencor PN 0088323-001 Assy, SE Actuator, F5x Flipper
KLA-Tencor PN 0100102-000 SQIO-SQID-RAFT-RJ-VERT
KLA-Tencor PN 21-0061 Image Processor, Cognex 5400
KLA-Tencor PN 26-0060R PCA Digiboard 8, F5X
KLA-Tencor PN 26-0105 PCA, Video, Matrox MARVEL
KLA-Tencor PN 26-0138 PCA, Advantage Driver, Fi; LVDT Driver PCA
KLA-Tencor PN 26-0155 DB-VMESA; SBC PCA
KLA-Tencor PN 26-0163 PCA, Interpolator, Heidenhain
KLA-Tencor PN 28-0115 XE Lamp Power Supply, 75W
KLA-Tencor PN 29-0246 Mirror, F5
KLA-Tencor PN 29-0251 Mirror, SE, Collection, F5
KLA-Tencor PN 29-0253 Mirror, F5, Fold
KLA-Tencor PN 29-0259 Tropel Lens, 1X DUV Objective
KLA-Tencor PN 29-0260 Tropel Lens, 15X DUV Objective
KLA-Tencor PN 29-0271 RGB CCD Camera COHU
KLA-Tencor PN 29-0297 Objective Lenses M Plan Apo 10x0.28
KLA-Tencor PN 29-0346 Isolator, Optical, 633mm
KLA-Tencor PN 29-0348 Lens PCX 12 x 15; Plano convex Lenses
KLA-Tencor PN 30-0039 Stage Assy, Coarse Z, F5
KLA-Tencor PN 30-0041 F5 ULPA Assy
KLA-Tencor PN 30-0074 Linear Motor Driven Stage; XY Stage, F5
KLA-Tencor PN 30-0075 Encoder, Readhead, Renishaw
KLA-Tencor PN 30-0082 Motor, Spindle, SWE
KLA-Tencor PN 39-0222 Driver, Motor, Microstepp "Polarizer Stepper Driver PCA"
KLA-Tencor PN 39-0253 PIEZO, Fine Z
KLA-Tencor PN 42-2258 Platen, 300mm, Stress
KLA-Tencor PN 52-0415 Motor Assy, Servo
KLA-Tencor PN 52-0455 Assy, Analyzer
KLA-Tencor PN 52-0551 Assy, Aperture Mirror
KLA-Tencor PN 52-0563 Analyzer "Stepper Motor Assy"
KLA-Tencor PN 52-0565 Assy, Motor Driver, Microstep
KLA-Tencor PN 52-0799 Assy, Electronics, LID F5
KLA-Tencor PN 52-0816 Assy, CCD Detector, F5
KLA-Tencor PN 52-0817 Valve Assy - Manifold 7 Station
KLA-Tencor PN 52-0865 Assy Computer, ASET-F5X
KLA-Tencor PN 52-0879 Assy, NB Filter Wheel, F5
KLA-Tencor PN 52-0880 Assy, Turret Optics Fiji
KLA-Tencor PN 52-0882 Assy, Camera, Filter F5X
KLA-Tencor PN 52-0900 Assy, (PDBS option), Analyzer Arm
KLA-Tencor PN 52-0901 Assy, Polarizer Arm (PDBS option)
KLA-Tencor PN 52-0913 Motor Assy, DBS/SE, Analyzer (Grating)
KLA-Tencor PN 52-0916 Assy, SE Actuator, F5X Flipper
KLA-Tencor PN 52-0917 Assy, DBS Spectometer, F5
KLA-Tencor PN 52-0929 Assy, SE Coarse Focus, F5
KLA-Tencor PN 52-0931 Assy, NB Filters, PatMax
KLA-Tencor PN 52-0933 Sensor Assy, Dual Hall Effect (stress option)
KLA-Tencor PN 52-0973 Assy HORZ Lamp F5x
KLA-Tencor PN 52-0979 Coarse Z Motor Encoder Assy
KLA-Tencor PN 52-1004 Assy, Analyzer, F5x Disp. (Prism)
KLA-Tencor PN 52-1009 Assy, Detector, SWE
KLA-Tencor PN 52-1090 Assy Apodizer
KLA-Tencor PN 52-1107 Assy FRU Camera Filter
KLA-Tencor PN 52-1159 FRU, Assy, Double Lens, FRU
KLA-Tencor PN 52-1178 SE Coarse Focus Assembly
KLA-Tencor PN 54-0335 PCA, Flat Aligner, Illum.
KLA-Tencor PN 54-0384 PCA, PCIF / Comm. Ports
KLA-Tencor PN 54-0397 PCA XYZ Interface
KLA-Tencor PN 54-0439 PCA, SWE MCB Tested
KLA-Tencor PN 54-0440 PCB Assy, FIJI-CCD Measurement Control
KLA-Tencor PN 54-0440-04 PCA, CCD Measurement Control Board
KLA-Tencor PN 54-0442-01 PCA, XYZ/FZ Interface,Sol (Solenoid Driver PCA)
KLA-Tencor PN 54-0446 PCA Assy. XYZ / FZ Interface
KLA-Tencor PN 54-0447-01-U PCA, COARSE Z Interface II
KLA-Tencor PN 54-0451 SBC I/O Expansion
KLA-Tencor PN 54-0454-03 PCA, SE Fine Focus w/FW V1.5
KLA-Tencor PN 54-0454-04 PCA, SE Fine Focus w/FW V1.5
KLA-Tencor PN 54-0456 SWE Focus Detector
KLA-Tencor PN 54-0463 PCA, Stepper Driver
KLA-Tencor PN 54-0464-01 PCA Assy. SBC I/F II
KLA-Tencor PN 54-0487 PCA, Tilt Sensor
KLA-Tencor PN 54-0488 PCA Course Focus Sensor II
KLA-Tencor PN 54-0488-01 PCA Course Focus Sensor II MOD Std.
KLA-Tencor PN 96-0044 Pneumatic, Rotary, 90 Deg
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