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Equipment < KLA-Tencor ASET-F5

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		KLA-Tencor ASET-F5 ____________ - Patterned UV Film Thickness Measurement - Dual Open Cassette Configuration - ±1.0% for films 250Å to 1.0µm - Stability= 500-2000Å <= 2.5Å and 2000Å-1µm <= 0.25% - Brooks robot, controller, & pre-aligner - Full Calibration and Installation Services available
	Click on image for larger picture...	KLA-Tencor F5(x) Parts