KLA 2133
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- Patterned Wafer Defect Inspection Tool
- Vintage: 1997
- Throughput ~ 2-16 wph
- Currently set up for 8" wafers
- 4", 5" & 6" wafer capable
- Sensitivity >0.25µm pixels
- Doubled scan speed (compared to 2132) at 0.62pixels
- Segmented Auto Threshold (SAT)
- 8" DSW calibration wafer included
- Power Line Conditioner Included
- Machine pictured is not of actual tool for sale

- Available Operational-Calibrated or Refurbished
- Installation Service Available