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Atmospheric Top Mount 3-axis |
Brooks PRI Equipe ATM104 Robot |
- One or Two Vacuum Lines (for Single/Dual End-Effectors) |
- HAMA Wafer Sensor Option |
- "SEMI S2-93" Standard Option |
- 4.5" Arm Link w/ 7.1" Z-Stroke |
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Repair & Refurbishment Services available for this model. |
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