| Part
Number: |
Description |
|
| KLA-Tencor SP1-xxx PN 0016052-000 |
PCB Assy, 8 RS232, ISA, Config |
| KLA-Tencor SP1-xxx PN 0016373-000 |
Lens, L2, BF, SP1-DLS |
| KLA-Tencor SP1-xxx PN 0016521-000 |
Wollaston Assy. BF, SP1-DLS |
| KLA-Tencor SP1-xxx PN 0017646-000 |
End Effector Assy, SP1-TBI |
| KLA-Tencor SP1-xxx PN 0018789-000 |
Laser Shutter Assy, SP1-DLS |
| KLA-Tencor SP1-xxx PN 0019191-000 |
Plate, Tool, Cass-Adapter, Edge Handling |
| KLA-Tencor SP1-xxx PN 0020753-000 |
PCB Assy, BW Sensor SP1 EH2 |
| KLA-Tencor SP1-xxx PN 0021409-000 |
Robot Assy, 13in,S2-93,Z-Brake,Dual |
| KLA-Tencor SP1-xxx PN 0023892-000 |
Chuck, 200/300mm Wafer, Vacuum, SP1 |
| KLA-Tencor SP1-xxx PN 0025018-000 |
PCB Assy APD Analog Board Config SP1-TQM |
| KLA-Tencor SP1-xxx PN 0025376-001 |
EHEE, 300mm, EHII |
| KLA-Tencor SP1-xxx PN 0026353-002 |
European Voltage Mod Assy SP1 DLS |
| KLA-Tencor SP1-xxx PN 0026469-000 |
PCB Assy APD Condition Board SP1-TQM |
| KLA-Tencor SP1-xxx PN 0029734-000 |
Keyboard Assy, UI, SP1-DLS |
| KLA-Tencor SP1-xxx PN 0029941-000 |
PWR SUPPLY,LASER,75 MW,SP1-DLS |
| KLA-Tencor SP1-xxx PN 0030600-002 |
Rotator, SP1-TQM |
| KLA-Tencor SP1-xxx PN 0030676-000 |
Body, EHEE, 200MM, EHII |
| KLA-Tencor SP1-xxx PN 0038054-000 |
Kit, OHT Lookout, DF, SP1 |
| KLA-Tencor SP1-xxx PN 0038565-000 |
Target, SP1 TQM T6 |
| KLA-Tencor SP1-xxx PN 0046621-000 |
Wafer Centering Assembly |
| KLA-Tencor SP1-xxx PN 0049453-002 |
PCB Assy, PMT Preamplifire, SP2 |
| KLA-Tencor SP1-xxx PN 0049519-000 |
Fiber Bundle, SP1-TQM |
| KLA-Tencor SP1-xxx PN 0050753-000 |
Quarter-half Wave Changer Assy, SP1 TBI |
| KLA-Tencor SP1-xxx PN 0057240-000 |
Kit, DVD Drive Upgrade (for SP1-TBI only) |
| KLA-Tencor SP1-xxx PN 0058175-000 |
Lens SP1-UV L4-C, Oblique |
| KLA-Tencor SP1-xxx PN 0059368-003 |
Plate, Arm, Centering Device, SP2 |
| KLA-Tencor SP1-xxx PN 0059911-001 |
Plate, Cam, Centering Device, SP1-UV |
| KLA-Tencor SP1-xxx PN 0060463-000 |
FRU, Assy, ACAL-Pin, SP1-TBI |
| KLA-Tencor SP1-xxx PN 0060473-000 |
PCB Assy, Dual Grip INTFC Node, V4 Config |
| KLA-Tencor SP1-xxx PN 0060974-002 |
Assy, Upper Front Panel, DLS |
| KLA-Tencor SP1-xxx PN 0061791-000 |
PCB Assy, Signal Processor 2.1, SP1 |
| KLA-Tencor SP1-xxx PN 0063462-000 |
PCB Assy, Actuator Sensor Board, SP1-UV |
| KLA-Tencor SP1-xxx PN 0064742-000 |
PCB Assy Power Distribution |
| KLA-Tencor SP1-xxx PN 0070679-000 |
Power Module Assy SP1 |
| KLA-Tencor SP1-xxx PN 0073548-000 |
PCB Assy, Analog DF, SP1 |
| KLA-Tencor SP1-xxx PN 0074638-000 |
200mm EH Chuck Body |
| KLA-Tencor SP1-xxx PN 0076287-000 |
Filter, OD3,PMT, SP1-UV |
| KLA-Tencor SP1-xxx PN 0083729-000 |
Plate Center Device Arm SP1-TBI |
| KLA-Tencor SP1-xxx PN 0084941-000 |
PCB Assy Analog DF, SP1-TBI Configured |
| KLA-Tencor SP1-xxx PN 0085196-000 |
PCB Assy, Robot Interface Config. SP1 UV |
| KLA-Tencor SP1-xxx PN 0091667-000 |
PCB Assy,PCI LON Adapt |
| KLA-Tencor SP1-xxx PN 0095543-000 |
Kit, SFS, SP1 Asyst, Wire |
| KLA-Tencor SP1-xxx PN 0098295-001 |
Assy, Shutter, Laser, TBI |
| KLA-Tencor SP1-xxx PN 0098354-000 |
Assy, Changer, L2, TBI |
| KLA-Tencor SP1-xxx PN 0098368-000 |
Assy, Isolator, TBI |
| KLA-Tencor SP1-xxx PN 0098370-001 |
Assy, Shutter, Laser, OBQ, TBI |
| KLA-Tencor SP1-xxx PN 0100780-001 |
Laser Safety Shutter Assy, SP1 DLS |
| KLA-Tencor SP1-xxx PN 0100781-001 |
Assy, Laser Shutter,Oblique: SP1-DLS |
| KLA-Tencor SP1-xxx PN 0111880-000 |
Plate, w/bearing, Cam. Center Device, SP1 |
| KLA-Tencor SP1-xxx PN 0111880-000 |
Plate, w/bearing, Cam. Center Device, SP1 |
| KLA-Tencor SP1-xxx PN 0135245-000 |
Bulkhead Filters Assy SP1 SP2 |
| KLA-Tencor SP1-xxx PN 0143495-000 |
Assy Lontalk PCLTA-21, SP1 |
| KLA-Tencor SP1-xxx PN 314331 |
Sensor Assy, Beam SHTRSW5, S8 |
| KLA-Tencor SP1-xxx PN 333360 |
PCB Spindle Distribution Board |
| KLA-Tencor SP1-xxx PN 334472 |
PCB Assy, Laser Node, SP1 |
| KLA-Tencor SP1-xxx PN 341096 |
Chuck VAC SW Assy, SP1 |
| KLA-Tencor SP1-xxx PN 342874 |
PCB Assy, BW Sensor PreAmp |
| KLA-Tencor SP1-xxx PN 343005 |
BF Preamplifier |
| KLA-Tencor SP1-xxx PN 347272 |
Laser Shutter Assy |
| KLA-Tencor SP1-xxx PN 347353 |
Auto Zero Assy, Optics |
| KLA-Tencor SP1-xxx PN 349089 |
Plate Cam Center Device SP1 |
| KLA-Tencor SP1-xxx PN 352705 |
Motor Assy,WFR SHTR SP1 |
| KLA-Tencor SP1-xxx PN 354716 |
Counter Balance Assy, KBRD, SP1 |
| KLA-Tencor SP1-xxx PN 358347 |
Control Assy, Spindle Motor |
| KLA-Tencor SP1-xxx PN 372382 |
SP1 BF Analog Board |
| KLA-Tencor SP1-xxx PN 375403 |
PCB Assy, Beam Position Sensor, SP1 TBI |
| KLA-Tencor SP1-xxx PN 376353 |
CASS Assy PLTF w/Rot 200/150 |
| KLA-Tencor SP1-xxx PN 379506 |
DCR, SP1 |
| KLA-Tencor SP1-xxx PN 383589 |
SBC TRP6V2 |
| KLA-Tencor SP1-xxx PN 384585 |
Laser Safety Shutter Assy |
| KLA-Tencor SP1-xxx PN 386596 |
Solenoid Assy, Laser Shutter |
| KLA-Tencor SP1-xxx PN 393398 |
Kit, Ballast, 12VDC Light |
| KLA-Tencor SP1-xxx PN 393541 |
Ellipsoid, Collector, SP1 |
| KLA-Tencor SP1-xxx PN 395471 |
QTR-Half Wave CHGR Assy; SP1 TBI |
| KLA-Tencor SP1-xxx PN 396141 |
Auto-Cal Pin Assy, SP1-TBI |
| KLA-Tencor SP1-xxx PN 397237 |
Lens, Doublet, L2, SP1 TB |
| KLA-Tencor SP1-xxx PN 500259 |
PCB Assy, Timing Generator |
| KLA-Tencor SP1-xxx PN 501832 |
BW Mirror Assy, Short, SP1-TBI |
| KLA-Tencor SP1-xxx PN 513202 |
Plate, Center Device, Arm, SP1-TBI |
| KLA-Tencor SP1-xxx PN 513989 |
Locator, Front, 200MM, SP1 |
| KLA-Tencor SP1-xxx PN 515426 |
ULPA Assy w/Gore-Tex SP1-TBI |
| KLA-Tencor SP1-xxx PN 516562 |
PCB Assy Beam Deflection SP1 |
| KLA-Tencor SP1-xxx PN 520292 |
PCB Assy, BF/DF DSP, SP1 |
| KLA-Tencor SP1-xxx PN 521213 |
PCB Assy, Spindle Distrib, SP1, Edge |
| KLA-Tencor SP1-xxx PN 521370 |
Assy, Chuck, 200mm, EH, SP1 |
| KLA-Tencor SP1-xxx PN 521922 |
End Effector SU |
| KLA-Tencor SP1-xxx PN 526584 |
Dual 200mm EHEE Assy, SP1 |
| KLA-Tencor SP1-xxx PN 526967 |
Motor Brushless Driver SC903, Single Axis |
| KLA-Tencor SP1-xxx PN 527300 |
End Effector, 300mm |
| KLA-Tencor SP1-xxx PN 536237 |
PCB, Echelon |
| KLA-Tencor SP1-xxx PN 536091 |
Beam Splitter Assy, BF-DF, SP1-TBI |
| KLA-Tencor SP1-xxx PN 545600 |
Motor Assy, SP1-TBI, GM87 |
| KLA-Tencor SP1-xxx PN 568147 |
Kit, Keypad/Trackball Assy, SP1 |
| KLA-Tencor SP1-xxx PN 569917 |
PCB Assy, Signal Processor |
| KLA-Tencor SP1-xxx PN 755-01763-012 |
Plate/Chuck 300mm Assy, SP1-TBI |
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