Coherent INNOVA AIT Laser System
Fully Rebuilt!
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- UV Laser Head Model: AIT-HD-KLA
- KLA-Tencor PN 750-33301-001
- Power Supply Model: SLX-PS-KLA
- Heat Exchanger Model: SLX-HE-KLA

- Laser Head Warranty: 12months or 2000 hours
- Heat Exchanger Warranty: 90-days
- Installation Service Available