| Part
Number: |
Description |
|
| KLA-Tencor AIT-xx PN 0000099-000 |
Cover finger, Dual, AIT |
| KLA-Tencor AIT-xx PN 0015169-000 |
AIT3, Retro, Frame Cell, Outgoing |
| KLA-Tencor AIT-xx PN 0017497-000 |
PMT, Assy, w/o PMT, COLL,AIT2/3 |
| KLA-Tencor AIT-xx PN 0017857-004 |
Collector Assy, Front, AIT2 |
| KLA-Tencor AIT-xx PN 0017858-004 |
Collector Assy, Rear, AIT2 |
| KLA-Tencor AIT-xx PN 0021439-000 |
Lens, Objective 90MM AIT UV |
| KLA-Tencor AIT-xx PN 0021441-000 |
Lens, Relay 560mm AIT UV |
| KLA-Tencor AIT-xx PN 0021443-000 |
Lens, Mag Changer 0.63x, AITUV |
| KLA-Tencor AIT-xx PN 0021445-000 |
Lens, Mag Changer 1.43x, AITUV |
| KLA-Tencor AIT-xx PN 0021451-000 |
Lens, Telephoto Relay AIT UV |
| KLA-Tencor AIT-xx PN 0022418-000 |
Mirror, Turning, Cool Side, AIT UV |
| KLA-Tencor AIT-xx PN 0024048-000 |
Data Processing Board, AITXP |
| KLA-Tencor AIT-xx PN 0024476-001 |
Assy Polarizer, Coll Side, AIT UV |
| KLA-Tencor AIT-xx PN 0024482-000 |
Assy 3-4 Lens Coll Side AIT UV |
| KLA-Tencor AIT-xx PN 0024498-004 |
Card Cage / Fan Assy Vendor AIT UV |
| KLA-Tencor AIT-xx PN 0024572-000 |
AOD Drive Assy, AIT UV |
| KLA-Tencor AIT-xx PN 0024735-000 |
Assy, Optical L1-L2 Nosecone, Coll Rear, AIT |
| KLA-Tencor AIT-xx PN 0024747-000 |
Assy Block Integrated Center AIT UV |
| KLA-Tencor AIT-xx PN 0025038-000 |
Assy Miror , M4/M5 AIT UV |
| KLA-Tencor AIT-xx PN 0025040-001 |
Assy MAG Changer, AIT UV |
| KLA-Tencor AIT-xx PN 0025048-000 |
Assy, Laser Servo Mirror, AITUV |
| KLA-Tencor AIT-xx PN 0025051-000 |
Assy, Chirp AOD/CYL Lens MNT, AIT UV |
| KLA-Tencor AIT-xx PN 0025395-000 |
Assy, Mirror, Spherical, Coll Side, AIT UV |
| KLA-Tencor AIT-xx PN 0026346-000 |
Assy, Polarization Changer, AIT UV |
| KLA-Tencor AIT-xx PN 0026413-000 |
PCB Assy, PMT, PREAMP, AIT2 |
| KLA-Tencor AIT-xx PN 0026791-000 |
Chuck Assy, 300-200 Post Support AIT2 |
| KLA-Tencor AIT-xx PN 0027104-000 |
Assy, M2, NNC AIT UV |
| KLA-Tencor AIT-xx PN 0030619-000 |
FRU, PCB Assy, Tested, APS3 Preamp w/PSD, AITXP |
| KLA-Tencor AIT-xx PN 0030620-000 |
FRU, PCB Assy, Wafer APS3.1 board AITXP |
| KLA-Tencor AIT-xx PN 0030735-001 |
Base, Flexure, Yaw, Cylinder, AIT UV |
| KLA-Tencor AIT-xx PN 0031279-000 |
Assy, Mount, Airslit, ILLUM, AIT UV |
| KLA-Tencor AIT-xx PN 0031750-001 |
PCB Assy, PSF Driver, AIT |
| KLA-Tencor AIT-xx PN 0032413-001 |
FRU, INTEG Sphere, w/PMT, channel 1/2, AIT XP |
| KLA-Tencor AIT-xx PN 0033799-001 |
PSF PCB, AIT3 |
| KLA-Tencor AIT-xx PN 0035370-002 |
Collector Assy, Front, NON-DSET, Spares AIT2/3 |
| KLA-Tencor AIT-xx PN 0035759-000 |
PCB Assy, Robot Distribution, AIT2-3-XP |
| KLA-Tencor AIT-xx PN 0033116-002 |
Assy, PMT Tower, Side Coll, AIT UV |
| KLA-Tencor AIT-xx PN 0034693-001 |
FRU made, APS NNC Tower, AIT3XP |
| KLA-Tencor AIT-xx PN 0035245-001 |
FRU, Upper Optometer-Mechanical, NNC Assy, AIT XP |
| KLA-Tencor AIT-xx PN 0037723-000 |
FRU, PCB Assy, Wafer APS3.1 board AITXP |
| KLA-Tencor AIT-xx PN 0038216-001 |
Hi-Volt. P/S Assy, AIT XP |
| KLA-Tencor AIT-xx PN 0038921-000 |
Kit, Retro-fit, 200mm Chuck/End Effector, AIT XP |
| KLA-Tencor AIT-xx PN 0039901-000 |
Fork Assy, 200mm, AIT XP |
| KLA-Tencor AIT-xx PN 0040110-000 |
PCB Assy, Uscope Board, AIT UV |
| KLA-Tencor AIT-xx PN 0040615-002 |
PCB, 2D Row Driver |
| KLA-Tencor AIT-xx PN 0041617-001 |
Assy, Vendor, 300mm Ceramic Chuck, AIT XP |
| KLA-Tencor AIT-xx PN 0041621-000 |
Assy, 300mm Warped Waferceramic Chuck, AIT XP |
| KLA-Tencor AIT-xx PN 0044220-000 |
Auto Focus Control, Olympus U-AFA1M-100H |
| KLA-Tencor AIT-xx PN 0044232-000 |
Polarizer Assy, NNC, AIT 3, XP |
| KLA-Tencor AIT-xx PN 0044710-000 |
Assy, 300mm Ceramic Chuck, AIT XP |
| KLA-Tencor AIT-xx PN 0044952-000 |
Lens, Mag Changer 1.7x AITUV |
| KLA-Tencor AIT-xx PN 0045403-000 |
FRU, Autofocus Tested w/Stage, AIT |
| KLA-Tencor AIT-xx PN 0047986-000 |
Piezo Assy, Theta-Z, AIT |
| KLA-Tencor AIT-xx PN 0049254-000 |
PSF, Assy, Coll, Rear |
| KLA-Tencor AIT-xx PN 0049255-000 |
PSF, Assy, Coll, Front |
| KLA-Tencor AIT-xx PN 0049260-000 |
PSF/Aperture AIT3 FRU |
| KLA-Tencor AIT-xx PN 0049727-001 |
PCB, Assy, Robot Distribution |
| KLA-Tencor AIT-xx PN 0050161-000 |
Polarizer Assy, AIT3, XP |
| KLA-Tencor AIT-xx PN 0050794-000 |
Assy, Calpin Calchip Mount, AIT UV |
| KLA-Tencor AIT-xx PN 0050978-001 |
PSF Driver 1D(PSFD1D) AIT2/AIT3 |
| KLA-Tencor AIT-xx PN 0051176-000 |
Assy, APS Tower/Center Block, AIT UV |
| KLA-Tencor AIT-xx PN 0051390-000 |
CHIRP AOD Splitter/Delay Line Assy |
| KLA-Tencor AIT-xx PN 0051391-000 |
Crystal Tech. AODF4095-1E, Chirp, 363.8nm |
| KLA-Tencor AIT-xx PN 0051393-000 |
Prescanner AOD Splitter/Delay Line Assy |
| KLA-Tencor AIT-xx PN 0053754-000 |
Crystal Tech. AODF4095-3E, 364nm, Thin Prescan |
| KLA-Tencor AIT-xx PN 0054722-000 |
Assy, Fiber Optic Bundled, AIT UV Pillar |
| KLA-Tencor AIT-xx PN 0054802-001 |
FRU, PCB Assy, GPIO |
| KLA-Tencor AIT-xx PN 0054829-000 |
FRU, Assy, Collector, Near Normal, AIT UV |
| KLA-Tencor AIT-xx PN 0055550-000 |
Assy Calchip Mounted AIT UV |
| KLA-Tencor AIT-xx PN 0055560-000 |
Assy Calchip Mounted AIT UV |
| KLA-Tencor AIT-xx PN 0056151-000 |
Assy, Finger Fork 300mm, Thin, AITUV |
| KLA-Tencor AIT-xx PN 0059481-000 |
Tested, Assy, PSF LCD/PCB, CH3, AIT UV |
| KLA-Tencor AIT-xx PN 0067395-000 |
Assy, Inlet Pneum Panel AIT-UV |
| KLA-Tencor AIT-xx PN 0072778-000 |
Assy, 200MM, STD Ceramic Chuck, AIT UV |
| KLA-Tencor AIT-xx PN 0072780-001 |
Assy, 300mm Standard Ceramic Chuck |
| KLA-Tencor AIT-xx PN 0074785-000 |
Lens, Mag Changer 2.3x AIT UV |
| KLA-Tencor AIT-xx PN 0074984-000 |
AIT UV Laser Heat Exchange |
| KLA-Tencor AIT-xx PN 0084144-000 |
Assy, 2ND Singlet Tube, 8UM-Ready, AIT XUV |
| KLA-Tencor AIT-xx PN 0085336-000 |
Assy APS TWR/CTR W/O Preamp AIT UV STD |
| KLA-Tencor AIT-xx PN 0085339-000 |
Assy APS TWR/Center BLK, W/O Preamp, 8UM-R |
| KLA-Tencor AIT-xx PN 0099586-001 |
Packaged Assy, Laser Servo Detector, AIT UV |
| KLA-Tencor AIT-xx PN 0120853-000 |
Kit, Clamp, Beamsplitter, Servo, AITUV |
| KLA-Tencor AIT-xx PN 121914 |
3-Axis AIT3 Air Bearing Stage |
| KLA-Tencor AIT-xx PN 179515 |
PMT Power Supply Assy (Bertan) |
| KLA-Tencor AIT-xx PN 188670 |
Locator Assy, 125mm |
| KLA-Tencor AIT-xx PN 188689 |
Locator Assy, 150mm |
| KLA-Tencor AIT-xx PN 188859 |
PCB Assy, 4-Channel Motor Drive |
| KLA-Tencor AIT-xx PN 261408 |
Motor Controller #1 PCB |
| KLA-Tencor AIT-xx PN 279420 |
Power Supply, 5V/9A, Linear |
| KLA-Tencor AIT-xx PN 279439 |
Power Supply, 15V/9A, Linear |
| KLA-Tencor AIT-xx PN 280496 |
Lens Assy, Coll Opt S8000 |
| KLA-Tencor AIT-xx PN 285293 |
PCB Assy, GPIO S8000 |
| KLA-Tencor AIT-xx PN 289787 |
PCB Assy, Timing Generator, AIT,S8000 |
| KLA-Tencor AIT-xx PN 292419 |
Air Slit Assy, S8000 |
| KLA-Tencor AIT-xx PN 292427 |
Tropel Cylindrical Anam. |
| KLA-Tencor AIT-xx PN 292443 |
Mfg. Tropel, Scan Group Assy. |
| KLA-Tencor AIT-xx PN 293598 |
PCB Assy, VAS Buffer |
| KLA-Tencor AIT-xx PN 294420 |
Motor Distribution PCB, #1 & 2 |
| KLA-Tencor AIT-xx PN 298018 |
Puck, 1x6.25x.1, SS/VESP,S8000 |
| KLA-Tencor AIT-xx PN 312177 |
PSF Assy, 45Deg, S8000 |
| KLA-Tencor AIT-xx PN 314765 |
Deflector, On-Axis, Cryst |
| KLA-Tencor AIT-xx PN 317268 |
Polarizer Assy, P2, S8000 |
| KLA-Tencor AIT-xx PN 318426 |
PCB Assy, DSP Serial Bus Term |
| KLA-Tencor AIT-xx PN 320552 |
PCB Assy, Keyboard Breakout, AIT |
| KLA-Tencor AIT-xx PN 327450 |
PCB Assy, Fastcom232/4ISA |
| KLA-Tencor AIT-xx PN 331619 |
Puck Assy, AIT Surfscan |
| KLA-Tencor AIT-xx PN 333514 |
Motorized Nosepiece 5/Objective |
| KLA-Tencor AIT-xx PN 337617 |
Shim / Slit Assy APS Pre-Amp AIT |
| KLA-Tencor AIT-xx PN 338583 |
Chuck Wafer Vacuum 8" AIT |
| KLA-Tencor AIT-xx PN 338699 |
Filter Assy, ND, Illum, AIT |
| KLA-Tencor AIT-xx PN 341444 |
PMT Assy, w/Pre-amp, Align, AIT |
| KLA-Tencor AIT-xx PN 344150 |
Trackball Kit, AIT |
| KLA-Tencor AIT-xx PN 348546 |
Optics Assy, COL45 AIT |
| KLA-Tencor AIT-xx PN 348554 |
Optics Assy, COL315, AIT |
| KLA-Tencor AIT-xx PN 356166 |
U500 Ultra/ES13479, Aerotech |
| KLA-Tencor AIT-xx PN 360414 |
Chuck Assy 8", AIT |
| KLA-Tencor AIT-xx PN 360430 |
Retro Kit CL-TL / CL-PN VAC REP |
| KLA-Tencor AIT-xx PN 360449 |
125-150mm Chuck Assy, Interchange |
| KLA-Tencor AIT-xx PN 361542 |
STG ASSY,THETA & Z,INT CH,AIT |
| KLA-Tencor AIT-xx PN 363251 |
PCB Assy, 4 Channel Motor Control, AIT |
| KLA-Tencor AIT-xx PN 363170 |
Camera, Sony DXC-950 |
| KLA-Tencor AIT-xx PN 369829 |
Obj, 100x, B/D Field |
| KLA-Tencor AIT-xx PN 373583 |
PCB Assy, Analog Board, AIT2 |
| KLA-Tencor AIT-xx PN 373680 |
Illuminator Assy, AIT |
| KLA-Tencor AIT-xx PN 373699 |
Illum Actuator Assy, AIT |
| KLA-Tencor AIT-xx PN 378348 |
PCB Assy, Uscope DR, AF, AIT |
| KLA-Tencor AIT-xx PN 380490 |
PCB Assy, PMT Preamp, AIT |
| KLA-Tencor AIT-xx PN 383015 |
PCB Assy PSF Driver AIT2 |
| KLA-Tencor AIT-xx PN 386065 |
PCB Assy, GPIO, AIT2 |
| KLA-Tencor AIT-xx PN 386090 |
GPIO Distribution PCB |
| KLA-Tencor AIT-xx PN 386537 |
Polarizer, Sheet, AIT2 |
| KLA-Tencor AIT-xx PN 390046 |
Lens, First, Quad, Rear, AIT2 |
| KLA-Tencor AIT-xx PN 390500 |
LPM Assy. |
| KLA-Tencor AIT-xx PN 391840 |
PSF, REAR, AIT2 |
| KLA-Tencor AIT-xx PN 391905 |
Cassette-Mask, Front, AIT2 |
| KLA-Tencor AIT-xx PN 391930 |
Servo Box Rear, Assy, AIT2 |
| KLA-Tencor AIT-xx PN 392812 |
Mirror Mount-3 Assy, AIT2 |
| KLA-Tencor AIT-xx PN 392847 |
First Waveplate Assy, AIT |
| KLA-Tencor AIT-xx PN 392855 |
Polarizer 2 Assembly |
| KLA-Tencor AIT-xx PN 392880 |
Shutter Assy, AIT2, (Newport) |
| KLA-Tencor AIT-xx PN 394874 |
Power Supply, 24V/6.5A |
| KLA-Tencor AIT-xx PN 394947 |
Motor Assy, Mask Servo, AIT2 |
| KLA-Tencor AIT-xx PN 395005 |
CYL Telescope-1 Assy, AIT2 14x Cyl. Anamorphic |
| KLA-Tencor AIT-xx PN 395013 |
CYL Telescope-2 Assy, 11.25x x Cyl. Anamorphic |
| KLA-Tencor AIT-xx PN 395030 |
Doublet-2 Assy, AIT2 |
| KLA-Tencor AIT-xx PN 395048 |
Triplet Scan Lens Assembly |
| KLA-Tencor AIT-xx PN 395056 |
2X MAG Converter Assy, AIT2 |
| KLA-Tencor AIT-xx PN 395064 |
1.4X MAG CONVERTER ASSY,AIT2 |
| KLA-Tencor AIT-xx PN 395617 |
PCB Assy, Z-Stage 25 Pin, AIT2 |
| KLA-Tencor AIT-xx PN 395641 |
PCB Assy, X-Offset Univ, AIT2 |
| KLA-Tencor AIT-xx PN 398586 |
PLL Chirp CLK AIT2 |
| KLA-Tencor AIT-xx PN 500437 |
Sensor Assy, ND IN, ILLUM, AIT2 |
| KLA-Tencor AIT-xx PN 500593 |
Solenoid Assy, Rotary, Beam shutter, AIT2 |
| KLA-Tencor AIT-xx PN 501689 |
Controller, 24VDC Brushless Blwr |
| KLA-Tencor AIT-xx PN 503363 |
End Effector/Puck Assy, 200mm, AIT2 |
| KLA-Tencor AIT-xx PN 504335 |
APS2/Align Chan Assy. |
| KLA-Tencor AIT-xx PN 504351 |
Shim/Slit Assy, APS Preamp, AIT2 |
| KLA-Tencor AIT-xx PN 504653 |
Chuck Assy, AIT2, 200mm |
| KLA-Tencor AIT-xx PN 504661 |
Chuck Assy, 300mm, AIT2 |
| KLA-Tencor AIT-xx PN 504815 |
Mag Changer Assy, Front, AIT2 |
| KLA-Tencor AIT-xx PN 504823 |
Mag Changer Assy, Rear, AIT2 |
| KLA-Tencor AIT-xx PN 505161 |
Blower Assy AIT 1 / 2 |
| KLA-Tencor AIT-xx PN 505366 |
Microscpe Assy AF, AIT2 |
| KLA-Tencor AIT-xx PN 506591 |
PIE Assy, Theta-Z,AIT2 |
| KLA-Tencor AIT-xx PN 506672 |
Sensor Assy, X-offset, Load, AIT2 |
| KLA-Tencor AIT-xx PN 507156 |
Passive Isolator Assy, Back Left AIT2 |
| KLA-Tencor AIT-xx PN 507172 |
Passive Isolator Assy, Front Left AIT2 |
| KLA-Tencor AIT-xx PN 507431 |
Motor Assy, AIT2, MCG 154 |
| KLA-Tencor AIT-xx PN 507610 |
Acousto-optic Deflector Assy AIT2 |
| KLA-Tencor AIT-xx PN 509868 |
Remote LED PCB |
| KLA-Tencor AIT-xx PN 501530 |
Encoder, X AXIS, Head/Scale |
| KLA-Tencor AIT-xx PN 510432 |
Chassis, DR-500, Aerotech, Excluding Amps |
| KLA-Tencor AIT-xx PN 510459 |
Amp, Servo, Aerotech, Linear Motor Driver |
| KLA-Tencor AIT-xx PN 510483 |
Multiplier, MX-10, X-Encoder |
| KLA-Tencor AIT-xx PN 510491 |
Multiplier, MX-50, Y-Encoder |
| KLA-Tencor AIT-xx PN 510530 |
Encoder, X AXIS, Head/Scale, Aerotech |
| KLA-Tencor AIT-xx PN 512931 |
PCB Assy. Analog AIT |
| KLA-Tencor AIT-xx PN 514241 |
APS2/Align Chan Assy |
| KLA-Tencor AIT-xx PN 514276 |
Mag Changer Assy, Front, AIT XP |
| KLA-Tencor AIT-xx PN 514284 |
Mag Changer Assy, Rear, AIT2 |
| KLA-Tencor AIT-xx PN 514314 |
Servo Box Rear, Assy, AIT2 |
| KLA-Tencor AIT-xx PN 514357 |
PSF, REAR, AIT2 |
| KLA-Tencor AIT-xx PN 514373 |
Cassette-Mask, Front, AIT2 |
| KLA-Tencor AIT-xx PN 514616 |
Polarizer 2, AIT2 |
| KLA-Tencor AIT-xx PN 517011 |
Level 1 Assy, Cass, Rear, AIT2 |
| KLA-Tencor AIT-xx PN 522660 |
Assy, Turning Mirror, Rear, AIT2 |
| KLA-Tencor AIT-xx PN 526126 |
Puck Assy, 200mm, Vendor, AIT2 |
| KLA-Tencor AIT-xx PN 528552 |
Puck Assy, 150mm, AIT2 |
| KLA-Tencor AIT-xx PN 532436 |
Telescope APS Alignment Verification, AIT |
| KLA-Tencor AIT-xx PN 533696 |
PCB, Assy. Data Process Bd. |
| KLA-Tencor AIT-xx PN 533734 |
Mechanical Assy, AOD Driver |
| KLA-Tencor AIT-xx PN 533823 |
SHIM/SLIT ASSY,APS PREAMP,AIT |
| KLA-Tencor AIT-xx PN 533947 |
PCB ASSY,8 MULTI-SERIAL,CONF |
| KLA-Tencor AIT-xx PN 534005 |
PCB, Pen. 200MHz, Y2K, Config |
| KLA-Tencor AIT-xx PN 535257 |
PWR MOD, TSTD, Calib, 5,12,-5,-12,24 |
| KLA-Tencor AIT-xx PN 539864 |
Motor Assy, AIT2, Pittman |
| KLA-Tencor AIT-xx PN 541117 |
Asphere Assy Coll Rear AIT2 |
| KLA-Tencor AIT-xx PN 541133 |
Fourth Lens Assy, Coll. Rear, AIT2 |
| KLA-Tencor AIT-xx PN 541214 |
Assy, Polarizer, Rear, AIT2 |
| KLA-Tencor AIT-xx PN 542431 |
SBC P2BX/550/512M |
| KLA-Tencor AIT-xx PN 542440 |
PCB ASSY,PIII BX SBC,550 MHZ,512MB,CONFIG |
| KLA-Tencor AIT-xx PN 543608 |
Indexer, SMIF, Auto ID, 200mm, AIT |
| KLA-Tencor AIT-xx PN 546496 |
Lens 8, Near Normal Coll. AIT3 |
| KLA-Tencor AIT-xx PN 548022 |
ASHPERE Assy, Norm Coll. AIT3 |
| KLA-Tencor AIT-xx PN 548162 |
Mirror 2 Assy, Norm Coll. AIT3 |
| KLA-Tencor AIT-xx PN 555363 |
Lifter ARM Assy, Coll Front, Spares, New, AIT2 |
| KLA-Tencor AIT-xx PN 556700 |
PCB Assy, µSCOPE Drive, Autofocus, AIT2/AIT3 |
| KLA-Tencor AIT-xx PN 560650 |
Lens 1-5 Tube Assy, Norm Coll AIT3 |
| KLA-Tencor AIT-xx PN 560740 |
Stage Z-Axis ABI2000 |
| KLA-Tencor AIT-xx PN 562521 |
Optics Set for AIT3 |
| KLA-Tencor AIT-xx PN 564338 |
Nosecone Assy, Coll, Front, AIT3 |
| KLA-Tencor AIT-xx PN 564842 |
FRU, APS/Align, AIT3 |
| KLA-Tencor AIT-xx PN 565920 |
FRU,PCB Assy,PSF Driver,AIT2 & AIT3 |
| KLA-Tencor AIT-xx PN 568210 |
FRU, Mask Changer Assy, AIT3 |
| KLA-Tencor AIT-xx PN 568279 |
FRU, Mounted Assy, L6, NNC,AIT3 |
| KLA-Tencor AIT-xx PN 568317 |
FRU, PCB, µSCOPE Drive, AF, AIT2 & AIT3 |
| KLA-Tencor AIT-xx PN 568325 |
PCB Assy Wafer APS3 Board,AIT3 |
| KLA-Tencor AIT-xx PN 568341 |
FRU, Kit, Remove HD Upgrade,AIT3 |
| KLA-Tencor AIT-xx PN 568384 |
Asphere Mounted Assy. AIT3 |
| KLA-Tencor AIT-xx PN 571180 |
PACKG, FRU, AIT3, MSCOPE |
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