| Part
Number: |
Description |
|
| KLA-Tencor PN 0132109-000 |
Kit, Replacement, 2-Flex Z-Stage, 8100XPR |
| KLA-Tencor PN 210-00709-000 |
Filter Air, Machine type 8100XP |
| KLA-Tencor PN 210-08898-000 |
High Vacuum Valve, Load Lock, 8300 |
| KLA-Tencor PN 500-01429-000 |
PCB, Keithley REM-64 Communications |
| KLA-Tencor PN 500-01430-000 |
PCB, Keithley MAO-8 D/A Converter |
| KLA-Tencor PN 500-01431-000 |
PCB, Keithley MAI-16 A/D Converter |
| KLA-Tencor PN 500-01432-000 |
PCB, Keithley MII-32 Digital Input |
| KLA-Tencor PN 720-01920-002 |
Assy, Arm Lifter, 8xxx |
| KLA-Tencor PN 720-02840-003 |
Assy, Rotate, Transfer Arm |
| KLA-Tencor PN 720-02841-500 |
Assy, Motor, X |
| KLA-Tencor PN 720-02842-500 |
Assy, Motor, Y |
| KLA-Tencor PN 720-02847-000 |
Assy, Chassis, MCA Module, 8100 |
| KLA-Tencor PN 720-02851-000 |
Assy, DC Distribution Chasis |
| KLA-Tencor PN 720-02964-000 |
Assy, Picoamp II |
| KLA-Tencor PN 720-03188-000 |
Assy, Adjustable, Upper, Focus |
| KLA-Tencor PN 720-03593-000 |
Assy, Lower DET, Version D for 8000 |
| KLA-Tencor PN 720-05299-001 |
Assy, Elevator, Adjustable, Round, W/Pad |
| KLA-Tencor PN 720-05658-002 |
Assy, Z-Stage for 8100T/8100R |
| KLA-Tencor PN 720-05887-001 |
MCP Detector Controller Chassis Assy w/Calibration |
| KLA-Tencor PN 720-05888-001 |
Assy, TFE Gun Controller Chassis w/Calibration |
| KLA-Tencor PN 720-06268-003 |
Assy, Elevator, Adjustable, Square |
| KLA-Tencor PN 720-06887-000 |
Assy, Chassis, Detector Amplifier |
| KLA-Tencor PN 720-06914-000 |
PICOAMMETER III |
| KLA-Tencor PN 720-07292-001 |
Assy, Arm Lifter, 8100XP |
| KLA-Tencor PN 720-07335-000 |
Advantech IPC-6706/6751, Chassis, ISABUS II |
| KLA-Tencor PN 720-07357-000 |
Assy. Loadlock, 8300 |
| KLA-Tencor PN 720-07515-001 |
Assy, Lower Quadruple |
| KLA-Tencor PN 720-07707-001 |
Assy, Docking Chamber |
| KLA-Tencor PN 720-08276-002 |
Assy, Loadlock, 8100E |
| KLA-Tencor PN 720-08906-000 |
Assy Stage X-Y 8300 |
| KLA-Tencor PN 720-09339-000 |
Assy Elevator, Centered for 8300 |
| KLA-Tencor PN 720-09354-001 |
IA USE 16709 Assy, Loadlock, 8100 XPR/XPT |
| KLA-Tencor PN 720-09841-001 |
Assy, Wehnelt/Condenser Power Supply |
| KLA-Tencor PN 720-10288-001 |
Assy Elevator Round with Pads |
| KLA-Tencor PN 720-12663-000 |
Assy, Drive, X-Axis |
| KLA-Tencor PN 720-12799-000 |
Assy, Turbo Pump Isolator |
| KLA-Tencor PN 720-13218-000 |
Assy. Reticle Carrier 5", 8100XPR |
| KLA-Tencor PN 720-14707-000 |
Assy, Carrier, Reticle, 6", 8100XPR |
| KLA-Tencor PN 720-15231-000 |
Assy, Optical Objective Lens, Large Wehnelt |
| KLA-Tencor PN 720-15272-000 |
Assy, Mirror Mount |
| KLA-Tencor PN 720-15297-001 |
Assy, Z-Stage, Complete, 2 Flex, 8100XPR/XPS |
| KLA-Tencor PN 720-15298-001 |
Assy Z-Stage Complete 2 FLEX 8100XP/XPS |
| KLA-Tencor PN 720-15830-000 |
Assy, Z-Height Sensor Vac Side |
| KLA-Tencor PN 720-16434-000 |
PCB Assy, Mechanical, Dual WIEN Controller |
| KLA-Tencor PN 720-16770-000 |
Assy Drive Y-Axis |
| KLA-Tencor PN 720-16771-000 |
Assy, Drive, X-Axis |
| KLA-Tencor PN 720-16934-000 |
Assy, 8300 Turbo Pump Isolator FRU |
| KLA-Tencor PN 720-16989-000 |
Assy, Handle, Reticle Pick |
| KLA-Tencor PN 720-17045-000 |
Assy, RETICLE Carrier 6", 8100XPR, Ceq. Compatible |
| KLA-Tencor PN 720-17080-000 |
Assy. Reticle Carrier Base 5" |
| KLA-Tencor PN 720-17255-000 |
Assy, End Effector, 8100XP |
| KLA-Tencor PN 720-17458-000 |
Assy, Kinematic Chuck, Adjustable |
| KLA-Tencor PN 720-17460-000 |
Assy Z-Stage, 2 Flexure |
| KLA-Tencor PN 720-17611-000 |
Assy, Stage X-Y, 84xx |
| KLA-Tencor PN 720-17790-001 |
Assy, Y, Motor Field Upgrade |
| KLA-Tencor PN 720-18215-000 |
Assy, 5" Reticle Carrier, 84xxR |
| KLA-Tencor PN 720-18319-000 |
Assy, Reticle Carrier Base 6", 84xxR |
| KLA-Tencor PN 720-18339-001 |
Assy, Aperture Holder |
| KLA-Tencor PN 720-18347-000 |
Assy. Stage, X-Y 300mm |
| KLA-Tencor PN 720-18791-001 |
Assy, Focus Ring, Law, Shielded PSD |
| KLA-Tencor PN 720-19204-000 |
Wafer Bias Standard |
| KLA-Tencor PN 720-22464-000 |
Assy, Base Height Sensor, RT |
| KLA-Tencor PN 720-22608-000 |
Monitor Swicth Box, Keemux |
| KLA-Tencor PN 720-22609-000 |
Monitor Switch Box, VOPEX Series |
| KLA-Tencor PN 720-22921-002 |
Assy, Bellows Pins Mount,Z-Stage |
| KLA-Tencor PN 720-24399-002 |
PCB Assy PICOAMMETER METEOR |
| KLA-Tencor PN 725-07289-000 |
Assy, Loadlock, 8100XP, Round |
| KLA-Tencor PN 730-06673-000 |
Assy, End Effector, 3" - 8" Wafer |
| KLA-Tencor PN 730-06907-002 |
Assy Shield Wien Filter |
| KLA-Tencor PN 730-07372-000 |
Assy Transfer Arm, 84xx |
| KLA-Tencor PN 730-15335-000 |
Plate, Wafer, 2 Flex |
| KLA-Tencor PN 730-16888-000 |
Assy Transfer Arm 84xx |
| KLA-Tencor PN 730-19390-000 |
End Effector Assy, Relieved Coated |
| KLA-Tencor PN 740-09897-000 |
Transfer Arm, Alumina |
| KLA-Tencor PN 740-16908-000 |
Tooling, Reference Plate, 8300 |
| KLA-Tencor PN 740-18178-000 |
Plate, Wehnelt, 8250R, Isolated Clamp |
| KLA-Tencor PN 780-04338-000 |
Kit Pump-Down Column 8100 |
| KLA-Tencor PN 780-07605-000 |
Kit, Wiring, Chamber, 8300 |
| KLA-Tencor PN 780-08315-000 |
Kit Fast Rough Accessories 8100E |
| KLA-Tencor PN 780-10479-000 |
Kit, Retrofit, Cold Cathode Gauge, Pfeiffer Vacuum |
| KLA-Tencor PN 780-13201-000 |
Kit, Assy. Elevator, Adjustable, Square |
| KLA-Tencor PN 780-14080-000 |
Kit, CIP II, 8100 |
| KLA-Tencor PN 780-14081-000 |
Kit, CIP II, 8100XP |
| KLA-Tencor PN 780-14970-001 |
Retrofit, Quick Pump, 8100XP/8300 |
| KLA-Tencor PN 780-16764-000 |
Kit, FRU, Lid Lift 8300 |
| KLA-Tencor PN 780-17269-000 |
Kit, CIP III, 8100R/8100T |
| KLA-Tencor PN 780-17270-000 |
Kit, CIP III, 8100ABS |
| KLA-Tencor PN 780-17272-000 |
Kit, CIP III, 8100XPR/8100 |
| KLA-Tencor PN 780-17273-000 |
Kit, CIP III, 8100XP-ABS |
| KLA-Tencor PN 780-17406-000 |
Kit, Upgrade, 8250R |
| KLA-Tencor PN 780-18756-000 |
Kit, SAL, 8250R |
| KLA-Tencor PN 820-08172-000 |
PCB Assy, Emitter, XPR Rack |
| KLA-Tencor PN 820-10736-000 |
PCB Assy, Metrabus 32-Channel Relay Output |
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