| Model / Part Number |
Description |
|
| KLA-Tencor
5100/5100XP/5105XP/5200XP Part# 0147371-000 |
End Effector Assembly |
| KLA-Tencor Archer PN Part# 0011283-000 |
5300NT CCD Cohu Camera |
| KLA-Tencor Archer PN Part# 0011286-002 |
Archer 10 PZT Driver Board |
| KLA-Tencor Archer PN Part# 0011327-000 |
PCA NT PZT Controller Board |
| KLA-Tencor 5300/Archer PN Part# 0013427-000 |
5300/ArcherNT I/O Board Assy |
| KLA-Tencor 5300/Archer PN Part# 0053800-001 |
Archer Wait Station |
| KLA-Tencor 5300/Archer PN Part# 0059518-000 |
PCB, A20 Feedback PZT Drive |
| KLA-Tencor 5xxx PN Part# 0148763-000 |
51/52 SMIF End Effector |
| KLA-Tencor
5010 or 5200XP Part# 030-400168-00 |
Camera |
| KLA-Tencor
5100/5100XP/5105XP/5200XP Part# 030-450519-00 |
Camera |
| KLA-Tencor
5200XP Part# 030-473089-000 |
Camera |
| KLA-Tencor 5010/5100XP/5105XP/5200X Part# 450-451822-00 |
PZT"W" 20µm range w/sensor, cable |
| KLA-Tencor 5010/5100XP/5105XP/5200X Part# 450-451849-00 |
PZT"Z" 40µm range w/sensor, cable |
| KLA-Tencor
5100 or 5200XP Part# 710-400363-00 |
Motherboard Assembly |
| KLA-Tencor
5100XP/5105XP/5200XP Part# 710-400535-00 |
LIN Array Board Assembly |
| KLA-Tencor
5100XP or 5200XP Part# 710-404144-00 |
PZT Feedback Board |
| KLA-Tencor
5200XP Part# 710-404146-00 |
A.L. Extention Board |
| KLA-Tencor
5010/5100XP/5105XP/5200XP Part# 710-404208-00 |
ARM Board |
| KLA-Tencor
5100XP Part# 710-404228-00 |
Limit Breakout Board |
| KLA-Tencor
5010/5100/5200XP Part# 710-404368-00 |
ALIB1 Board |
| KLA-Tencor
5010 or 5200XP Part# 710-404420-00 |
I/O Board |
| KLA-Tencor
5010/5100/5200XP Part# 710-404556-00 |
Stepper Driver Board |
| KLA-Tencor
5100/5100XP/5200XP Part# 710-404582-00 |
PZT Controller Board |
| KLA-Tencor
50xx Part# 712-404056-11 |
SBC VME CPU 16Hz 4Mb (Rev.B) |
| KLA-Tencor
Archer Part# 710-404584-00 |
PDA (Pin Diode Array) Assy. |
| KLA-Tencor
5200XP Part# 710-450818-002 |
Pin Diode Board Assembly |
| KLA-Tencor
5100/5105/5100XP Part# 710-451730-00 |
Encoder Board Assembly |
| KLA-Tencor
5x00 Part# 710-471773-000 |
PEARL PZT Adapter Board |
| KLA-Tencor
5300/Archer Part# 710-480099-002 |
5300/Archer PZT Driver Board Assy |
| KLA-Tencor
5300 Part# 710-480101-006 |
5300 Interface Board Assy |
| KLA-Tencor
5300/Archer Part# 710-482350-001 |
5300NT PDA Box Assy |
| KLA-Tencor
5105/5200 Part# 712-404561-00 |
8MB Memory Board |
| KLA-Tencor
5100 or 5200XP Part# 712-450673-00 |
Motor CPU 16.7Hz,4MB |
| KLA-Tencor
5300/Archer Part# 712-482130-000 |
5300 Fan Assy |
| KLA-Tencor 5100XP or 5200XP Part# 716-402608-00 |
Pre Aligner Assembly |
| KLA-Tencor 5100/5100XP/5200XP Part# 716-412248-00 |
Low Contamination Linear Arm Assembly |
| KLA-Tencor 5100/5100XP/5200XP Part# 716-450033-00 |
Shutter Assembly |
| KLA-Tencor 5200 or 5200XP Part# 716-470036-00 |
52XX Stage |
| KLA-Tencor Archer Part# 716-480011-003 |
Floatation System w/new Springs |
| KLA-Tencor Archer Part# 716-480428-004 |
XYT Stage BO SHN 565 091 096 |
| KLA-Tencor 5200XP Part# 718-482633-000 |
5300 CPU Assembly |
| KLA-Tencor 5100/5200XP Part# 718-482633-001 |
Motorola Single Board Computer |
| KLA-Tencor 51xx/52xx Part# 720-450025-00 |
5100 Illuminator Assy (Rev. B1) |
| KLA-Tencor 5200/5100XP/5200XP Part# 720-451715-00 |
KLAASP 1/2" Assembly T/K |
| KLA-Tencor 5100/5100XP/5200XP Part# 720-470028-00 |
Dual Apperature 5200 Assembly |
| KLA-Tencor 5300/Archer Part# 720-482342-000 |
End Effector Kit 8" for 5300 Assy |
| KLA-Tencor 5100 Part# 730-401953-01 |
V Motor |
| KLA-Tencor 5xxx Part# 740-450321-00 |
VFU Assy. |
| KLA-Tencor 5100XP or 5200XP Part# 740-451952-00 |
Elevator Assembly |
| KLA-Tencor 5200XP Part# 740-470299-00 |
VFU 52 Assembly |
| KLA-Tencor 5300/Archer Part# 740-480413-002 |
8"-12" Chuck for 5300 |
| KLA-Tencor 5100/5200/5200XP Part# 750-400159-00 |
Digitizer VIP 1024 (Matrox) |
| KLA-Tencor 5010 Part# 750-404260-00 |
Bit 3 VME Board |
| KLA-Tencor 5100 or 5100XP Part# 750-450863-00 |
Line Conditioner, 3KVA 60Hz Japan |
| KLA-Tencor 5200XP Part# 750-472512-000 |
Main Locker Assembly for SMIF: BYE OAS |
| KLA-Tencor 5200XP Part# 760-472812-000 |
Camera |
| We have more 5xxx & Archer parts not listed as well... |
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