KLA-Tencor Thermawave OptiProbe 5340C
Fully Operational
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- Complex Thin Film Thickness Measurement
- 65nm IC Production Accuracy
- 300mm, 200mm, & 150mm Wafers
- Win NT
- Software Version 4.1a14
- t, k, n Matching of Complex Films
- Cognex Pattern Recognition

- BPR: Beam Profile Reflectometry
- BPE: Beam Profile Ellipsometry
- DUV: Deep Ultra-Violet Broad-Band Reflectometer
- AE: Absolute Ellipsometer
- SE: Spectroscopic Ellipsometer