KLA-Tencor 2401 Viper
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- Macro Defect Inspection System
- 80wph/200mm Throughput/Wafer
- 50µm sensitivity
- Brightfield/Darkfield (Non)Patterned Inspection
- Edge Exclusion down to 1mm
- Dual cassette Brooks robot w/ pre-aligner
- Windows NT OS
- Full Calibration and Installation Services available