KLA-Tencor 6220 Surfscan ____________ - Non-Patterned Surface Particle Measurement - 100wph/200mm Throughput/Wafer @ 1.2µm - 90nm sensitivity >80% capture rate - Darkfield (Non)Patterned Inspection - From 4" to 8" wafers. - Full Calibration and Installation Services available
KLA-Tencor Surfscan Parts
Equipment I Parts I Services I Contact Us I Home page I Site Map
