KLA 2139
____________
- Patterned Wafer Defect Inspection Tool (UBB)
- Throughput ~ 15-30 wph
- Currently set up for 8" wafers
- 4", 5" & 6" wafer capable
- Sensitivity >0.16µm pixels
- WinNT
- 8" DSW calibration wafer included
- Power Line Conditioner Included

- Available Operational-Calibrated or Refurbished
- Installation Service Available