KLA 2135
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- Patterned Wafer Defect Inspection Tool
- Throughput ~ 8-20 wph
- Currently set up for 8" wafers
- 4", 5" & 6" wafer capable
- Sensitivity >0.25µm pixels
- DOS OS
- 8" DSW calibration wafer included
- Power Line Conditioner Included

- Available Operational-Calibrated or Refurbished
- Installation Service Available