Equipment < KLA 2133   REQUEST A QUOTE: e-mail sales@gSEMI.com
  2133  
 
 
  KLA 2133

KLA 2133
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- Patterned Wafer Defect Inspection Tool
- Vintage: 19
97
- Throughput ~ 2-16 wph
- Currently set up for 8" wafers
- 4", 5" & 6" wafer capable
- Sensitivity >0.25µm pixels
-
Doubled scan speed (compared to 2132) at 0.62pixels
- Segmented Auto Threshold (SAT)
- 8" DSW calibration wafer included
- Power Line Conditioner Included
- Machine pictured i
s not of actual tool for sale


- Available Operational-Calibrated or Refurbished
- Installation Service Availabl
e

  Click on image for larger picture... KLA 2132/33 Parts
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