KLA 2132
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- Patterned Wafer Defect Inspection Tool
- Vintage: 1995
- Throughput ~ 2-8 wph
- Currently set up for 8" wafers
- 4", 5" & 6" wafer capable
- Sensitivity >0.25µm pixels
- Segmented Auto Threshold (SAT)
- 8" DSW calibration wafer included
- Power Line Conditioner Included

- Available Refurbished
- Installation Service Available