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Equipment < KLA-Tencor UV1280SE

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		KLA-Tencor UV1280SE ____________ - Patterned UV Film Thickness Measurement - Dual Open Cassette Configuration - ±1.5Å Oxide SPEC <120Å (SE) - ±1% Oxide SPEC >500Å (SE) - Brooks robot, controller, & pre-aligner - Full Calibration and Installation Services available
	Click on image for larger picture...	KLA-Tencor UV1xxx Parts