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KLA-Tencor UV1270SE
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- Patterned UV Film Thickness Measurement
- Ballroom SMIF Configuration
- ±1.5Å Oxide SPEC <120Å (SE)
- ±1% Oxide SPEC >500Å (SE)
- Asyst Indexer & Brooks robot, controller, & pre-aligner
- Full Calibration and Installation Services available |