SDI MC/PDM 300mm
Fully Operational
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- Plasma Damage & Contamination Analysis
- 300mm Wafers
- Residual charge mapping with >6000 points in ~3 minutes.
- Uses Non-Contact COCOS vs. tradition Contact C-V characterization.
- (COCOS) Corona-Oxide Characterization of Semiconductor
- (MC) Mobile Charge ion mapping of Na & Cu contaminants (Pre/Post Thermal Stress).
- (PDM) Plasma Damage Monitoring (from Charging)
- Brooks ATM-105 3-axis robot