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Equipment < Nanometrics NanoSpec 9300

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Nanometrics NanoSpec 9300
Fully Operational
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- Advanced Thin Film Thickness Measurement and Analysis
- 65nm IC Production Accuracy
- 300mm Wafers
- Win XP
- SW Version 6.5

- DUV: Deep Ultra-Violet (193nm) Broad-Band Reflectometer
- SE: Spectroscopic Ellipsometer

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