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Equipment < KLA-Tencor AIT-XP

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		KLA-Tencor AIT XP ____________ - Patterned Surface Defect Inspection - 200mm/300mm Dual FIMS Asyst Loader - @130nm & 100nm Capture Ability - "Real Time" iADC (Inline Auto Defect Classification) - Brooks Robot, Track, Controller, & Pre-aligner - Full Calibration and Installation Services available
	Click on image for larger picture...	KLA-Tencor AIT-xx Parts